Tabletop film thickness tool with vision for measuring transparent films of thickness up to 500 µm.
Fully automated version of KV-300 available with many options.
Tabletop film thickness tool for measuring transparent films of thickness up to 160 µm.
Replacement optics, PC, and software for Nanometrics microscope systems (180/181/210)
Manual tabletop film thickness tool for measuring transparent films of thickness up to 160 µm.
L-2 product is also available in component form to allow easy integration or clustering with other tools. Very compact design enables in-process metrology.
Tabletop metrology tool for measuring Si, GaAs, resist, … of thickness range 20 µm to 500+ µm (Si) or > 1 mm of resist. Ideal for process control of backthinned Si.