- Windows operating system for reliability and ease of networking within fab
- Password login for production, semi-auto, engineer, and maintenance modes
Production Mode
- Automatically measure multiple sites on wafer
- One button RUN generates thickness results with statistics
- Alerts may be defined for thickness and fit out of range condition
- Advanced Wafermap® software for mapping and statistical process control (SPC)
- Automatic deskew for KV-300 systems with vision option
Engineer Mode
- Manual site measurement
- Pattern and film editors for production program definition
- Sophisticated editor generates grid, ring, line, or custom patterns
- Absolute reflectivity measurements
- Export reflectivity and model data to text files
- Maintenance functions
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