• Film materials: any non- or weakly-absorbing material such as resists, oxides, nitrides, poly-Si
• Substrate materials: Si, glass, plastics, metals, etc.
• 2 layer measurements
• single point measurements, manually positioned wafer

Thickness measurement ranges: 0.2 – 160 µm (configuration /B); 0.05 – 70 µm (/D)
Short-term repeatability: ¹ < 1 nm typical
Long-term repeatability: ² 1 nm
Measurement spot diameter: 50 µm
Lamp life: > 5000 hour

¹  1 sigma for 20 fixed-point, consecutive measurements of 1 µm oxide on Si
²  1 sigma of daily average of short-term repeatability over 30 days