KV-300 Specifications

  • Film materials: any non- or weakly-absorbing material such as resists, oxides, nitrides, poly-Si
  • Substrate materials: Si, glass, GaAs, metals, etc.
  • Multi-layer measurements
  • Absolute reflectivity measurements
  • Footprint of 0.75 m deep x 0.9 m wide (with PC)

Thickness measurement range:




Short-term repeatability: 1
Long-term repeatability: 2
Measurement spot size:
Stage life:
Lamp life:

0.08 – 200 µm (configuration /A)
0.2 – 350 µm (/B)
0.5 – 500 µm (/C)
0.04 – 60 µm (/D)
0.04 – 130 µm (/Dx)
< 1 nm typical
< 1 nm
25 µm dia., 13 x 50 µm with vision option
> 100 km of travel
> 5000 hours

Notes:
1  1 sigma for 20 fixed-point, consecutive measurements of 1 µm oxide on Si
2  1 sigma of daily average of short-term repeatability over 30 days