KF-10 Specifications

  • Film materials: any non- or weakly-absorbing material such as resists, oxides, nitrides, poly-Si
  • Substrate materials: Si, glass, GaAs, metals, etc.
  • Multi-layer measurements
  • Absolute reflectivity measurements
  • Footprint of 0.45 m deep x 0.35 m wide (without included PC)