KF-10 Specifications

  • Film materials: any non- or weakly-absorbing material such as resists, oxides, nitrides, poly-Si
  • Substrate materials: Si, glass, GaAs, metals, etc.
  • Multi-layer measurements
  • Absolute reflectivity measurements
  • Footprint of 0.45 m deep x 0.35 m wide (without included PC)

Thickness measurement range:

Short-term repeatability: 1
Long-term repeatability: 2
Measurement spot size:
Stage life:
Lamp life:

0.08 – 160 µm (configuration /A)

< 1 nm typical
< 1 nm
25 µm dia.
> 100 km of travel
> 5000 hours

Notes:
1  1 sigma for 20 fixed-point, consecutive measurements of 1 µm oxide on Si
2  1 sigma of daily average of short-term repeatability over 30 days