FTP (file access is password protected) Manuals: Operation Manual KV-300 Installation & Maintenance KF-10 Installation & Maintenance L-2 Installation & Maintenance Software Releases: v2.5.3 (2011) v2.6 (2016) v2.7 (2026) Wafermap 3 Spectrometer Drivers (Win8+) Release Notes Material Files: AZ 4620 AZ 9260 BCB 4024 @ 95C BCB 4024 @ 210C BCB 4024 @ 250C Sputtered Cu under resist InP LiTaO3 Oxide: VLSI standard perMX dry film resist pimel polyimide SiN SU-8 THB-430 THB-151n TiW Ti WBR-2120 AZ10XT: use AZ9620