Film materials: any non- or weakly-absorbing material such as resists, oxides, nitrides, poly-Si Substrate materials: Si, glass, GaAs, metals, etc. Multi-layer measurements Absolute reflectivity measurements Footprint of 0.75 m deep x 0.9 m wide (200 mm configuration)
	Thickness measurement range:	20 nm to > 90 µm
	Short-term repeatability: 1	0.1 nm 0.5 nm @ thicknesses > 60 µm
	Long-term repeatability: 2	0.3 nm
	Absolute reflectivity accuracy:	± 0.5 %
	Measurement spot diameter:	50 µm
	Stage life:	> 100 km of travel
	Lamp life:	> 5000 hours

 

Notes:

1  1 sigma for 20 fixed-point, consecutive measurements of 1 µm oxide on Si 2  1 sigma of daily average of short-term repeatability over 30 days