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![]() KV-300 |
Tabletop film thickness tool with vision for measuring transparent films of thickness up to 500 µm. |
![]() KF-10 |
Tabletop film thickness tool for measuring transparent films of thickness up to 160 µm. |
![]() L-2 |
Manual tabletop film thickness tool for measuring transparent films of thickness up to 150 µm. |
![]() Si-71 |
Tabletop metrology tool for measuring Si, GaAs, resist, ... of thickness range 20 µm to 500+ µm (Si) or > 1 mm of resist. Ideal for process control of backthinned Si. |
| Inline | Above products are also available in component form to allow easy integration or clustering with other tools. Very compact design enables in-process metrology. |