Foothill Instruments: KV-300 Specs

KV-300 Specifications

Film materials: any non- or weakly-absorbing material such as resists, oxides, nitrides, poly-Si Substrate materials: Si, glass, GaAs, metals, etc. Multi-layer measurements Absolute reflectivity measurements Footprint of 0.75 m deep x 0.9 m wide (with PC)

	Thickness measurement range:	0.08 - 200 µm (config "A") 0.2 - 350 µm ("B") 0.5 - 500 µm ("C") 0.04 - 40 µm ("D")
	Short-term repeatability: ¹	< 1 nm typical
	Long-term repeatability: ²	< 1 nm
	Measurement spot size:	13 x 50 µm 100 µm (config D)
	Stage life:	> 100 km of travel
	Lamp life:	> 5000 hours

Notes: ¹ 1 sigma for 20 fixed-point, consecutive measurements of 1 µm oxide on Si
² 1 sigma of daily average of short-term repeatability over 30 days