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KF-10 Specifications

  • Film materials: any non- or weakly-absorbing material such as resists, oxides, nitrides, poly-Si
  • Substrate materials: Si, glass, GaAs, metals, etc.
  • Multi-layer measurements
  • Absolute reflectivity measurements
  • Footprint of 0.45 m deep x 0.35 m wide (without included PC)
 
Thickness measurement range: 0.08 - 160 µm
Short-term repeatability: 1 < 1 nm typical
Long-term repeatability: 2 < 1 nm
Measurement spot diameter: 25 µm
Stage life: > 100 km of travel
Lamp life: > 5000 hours

 
Notes: 1  1 sigma for 20 fixed-point, consecutive measurements of 1 µm oxide on Si
2  1 sigma of daily average of short-term repeatability over 30 days

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