Foothill Instruments: L-2 Specs

L-2 Specifications

Film materials: any non- or weakly-absorbing material such as resists, oxides, nitrides, poly-Si Substrate materials: Si, glass, plastics, metals, etc. 2 layer measurements single point measurements, manually positioned wafer

	Thickness measurement ranges:	0.2 - 160 µm (configuration /B)
		0.05 - 70 µm (/D)
	Short-term repeatability: ¹	< 1 nm typical
	Long-term repeatability: ²	1 nm
	Measurement spot diameter:	50 µm
	Lamp life:	> 5000 hours

Notes: ¹ 1 sigma for 20 fixed-point, consecutive measurements of 1 µm oxide on Si
² 1 sigma of daily average of short-term repeatability over 30 days